@article{755786,
  author = {O Glembocki and J Tuchman and John Dagata and K Ko and S Pang and C Stutz},
  title = {Electronic Properties of GaAs Surfaces Etched in an Electron Cyclotron Resonance Source and Chemically Passivated Using P2S5},
  year = {1998},
  number = {73(1)},
  month = {1998-01-01 00:01:00},
  publisher = {Applied Physics Letters},
  language = {en},
}