@conference{755776,
  author = {Bradley Damazo and Andras Vladar and Alice Ling and Alkan Donmez and Michael Postek and Crossley Jayewardene},
  title = {SEM Sentinel-SEM Performance Measurement System},
  year = {2001},
  number = {4344},
  month = {2001-08-01 00:08:00},
  publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XV, Neal T. Sullivan, Editor, Santa Clara, CA, USA},
  language = {en},
}