@conference{755711,
  author = {Richard Silver and Carsten Jensen and V Tsai and Joseph Fu and John Villarrubia and E Teague},
  title = {Developing a Method to Determine Linewidth Based on Counting the Atom-Spacings Across a Line},
  year = {1998},
  number = {3332},
  month = {1998-06-01 00:06:00},
  publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XII, Bhanwar Singh, Editor, Santa Clara, CA, USA},
  language = {en},
}