@conference{755636,
  author = {M Davidson and M Bishop and Robert Larrabee and Michael Stocker and Jay Jun and Egon Marx and Richard Silver and Ravikiran Attota},
  title = {Evaluation of New In-Chip and Arrayed Line Overlay Target Designs},
  year = {2004},
  number = {5375},
  month = {2004-05-24 00:05:00},
  publisher = {Proceedings of SPIE, Santa Clara, CA, USA},
  language = {en},
}