@conference{7556,
  author = {Andras Vladar and John Villarrubia and Bin Ming and Regis Kline and Jasmeet and Scott List and Michael Postek},
  title = {10 nm Three-Dimensional CD-SEM Metrology},
  year = {2014},
  month = {2014-04-10},
  publisher = {SPIE Advanced Lithography, San Jose, CA},
  language = {en},
}