@conference{755566,
  author = {Malgorzata Kopycinska-Mueller and Roy Geiss and Donna Hurley},
  title = {Size-related plasticity effects in AFM silicon cantilever tips},
  year = {2006},
  number = {924},
  month = {2006-04-17 00:04:00},
  publisher = {Materials Research Society 2006 Spring Meeting, San Francisco, CA, USA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=50330},
  language = {en},
}