@conference{755521,
  author = {Ravikiran Attota and Richard Silver and M Bishop and Egon Marx and Jay Jun and Michael Stocker and M Davidson and Robert Larrabee},
  title = {Evaluation of New In-Chip and Arrayed Line Overlay},
  year = {2004},
  number = {5375},
  month = {2004-05-01 00:05:00},
  publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XVIII, Richard M. Silver, Editor, Santa Clara, CA, USA},
  language = {en},
}