@article{755161,
  author = {M Scheinfein and John Unguris and Michael Kelley and Daniel Pierce and Robert Celotta},
  title = {Scanning Electron Microscopy With Polarization Analysis (SEMPA)},
  year = {1990},
  number = {61},
  month = {1990-01-01 00:01:00},
  publisher = {Review of Scientific Instruments},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=620360},
  language = {en},
}