@conference{755031,
  author = {Hrishikesh Panchawagh and David Serrell and Faheem Faheem and Cari Herrmann and Dudley Finch and Roop Mahajan},
  title = {Packaging of In-Plane Micro-Actuators for BioMEMS Applications},
  year = {2005},
  month = {2005-11-05 00:11:00},
  publisher = {Microtechnologies inb Medicine and Biology, Oahu, HI, USA},
  doi = {https://doi.org/10.1115/IMECE2005-82528},
  language = {en},
}