@conference{754911, author = {R Gupta and Zeina Kubarych and Jabez McClelland and Robert Celotta}, title = {Pitch Standards via Laser-Focused Deposition}, year = {1994}, month = {1994-01-01 00:01:00}, publisher = {Conference on Industrial Applications of Scanned Probe Microscopy, Gaithersburg, MD, USA}, language = {en}, }