@conference{754861,
  author = {Roy Geiss and David Read},
  title = {Microstructure of 100 nm damascene copper overburden and lines studied by electron backscatter diffraction},
  year = {2007},
  month = {2007-08-06 00:08:00},
  publisher = {SPIE Proceedings, Nano Science and Engineering 2007, San Diego, CA, USA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=50619},
  language = {en},
}