@conference{754851,
  author = {Robert Keller and Cynthia Volkert and Roy Geiss and Andrew Slifka and David Read and Nicholas Barbosa and Reiner Monig},
  title = {Electrical Methods for Mechanical Characterization of Interconnect Thin Films},
  year = {2005},
  number = {21},
  month = {2005-09-01 00:09:00},
  publisher = {Advanced Metallization Conf., Proc., Colorado Springs, CO, USA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=50210},
  language = {en},
}