@conference{754516, author = {Richard Silver and James Potzick and Fredric Scire and Robert Larrabee}, title = {High Accuracy Overlay Measurements}, year = {1996}, number = {2725}, month = {1996-05-01 00:05:00}, publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography X, Susan K. Jones, Editor, Santa Clara, CA, USA}, language = {en}, }