@conference{754491, author = {J Lowney and Andras Vladar and Michael Postek}, title = {High-Accuracy Critical-Dimension Metrology Using a Scanning Electron Microscope}, year = {1996}, number = {2725}, month = {1996-05-01 00:05:00}, publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography X, Susan K. Jones, Editor, Santa Clara, CA, USA}, language = {en}, }