@article{754401,
  author = {Jay Marchiando and Joseph Kopanski and John Albers},
  title = {Limitations of the Calibration Curve Method for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements},
  year = {2000},
  number = {18},
  month = {2000-03-01 00:03:00},
  publisher = {Journal of Vacuum Science and Technology},
  language = {en},
}