@conference{754391,
  author = {Richard Allen and Ravi Patel and Michael Cresswell and Christine Murabito and Brandon Park and Monica Edelstein and Loren Linholm},
  title = {Recent Developments in Producing Test-structures for Use as Critical Dimension Reference Materials},
  year = {2004},
  month = {2004-03-01 00:03:00},
  publisher = {ICMTS IEEE International Conference on Microelectronic Test Structures, Awaji Island, 1, JA},
  language = {en},
}