@conference{754381,
  author = {Kristine Bertness and Todd Harvey and Albert Paul and Larry Robins and Gregory Turk and Therese Butler and Marc Salit},
  title = {Composition Verification of AlGaAs Epitaxial Layers using Inductively Coupled Plasma Optical-Emission Spectroscopy},
  year = {2003},
  month = {2003-09-28 00:09:00},
  publisher = {North American Conf. on Molecular Beam Epitaxy (NAMBE 2003), Keystone, CO, USA},
  language = {en},
}