@misc{754351, author = {Marla Dowell and Christopher Cromer and Richard Jones and Darryl Keenan and Thomas Scott}, title = {New Developments in Deep Ultraviolet Laser Metrology for Photolithography}, year = {2000}, month = {2000-01-01 00:01:00}, publisher = {SME Tech. Note}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=229}, language = {en}, }