@article{753961,
  author = {B. Peko and R. Champion and MVVS. Rao and James Olthoff},
  title = {Measured cross sections and ion energies for a CHF<sub></sub>3 discharge.},
  year = {2002},
  number = {92},
  month = {2002-08-01 00:08:00},
  publisher = {Journal of Applied Physics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=9195},
  language = {en},
}