@conference{753771, author = {Richard Cavicchi and John Suehle and P Chaparala and Kenneth Kreider and Michael Gaitan and Stephen Semancik}, title = {Micro-Hotplate Gas Sensor}, year = {1994}, month = {1994-12-31 00:12:00}, publisher = {Proc., Solid-State Sensor and Actuators Workshop, Hilton Head, SC, USA}, language = {en}, }