@article{7166,
  author = {Bryan Barnes and Francois Goasmat and Martin Sohn and Hui Zhou and Andras Vladar and Richard Silver},
  title = {Effects of wafer noise on the detection of 20 nm defects using optical volumetric inspection},
  year = {2015},
  number = {14},
  month = {2015-02-11},
  publisher = {Journal of Micro/Nanolithography, MEMS, and MOEMS},
  doi = {https://doi.org/10.1117/1.JMM.14.1.014001},
  language = {en},
}