@article{70216,
  author = {Zachary Levine and Thomas Lucatorto and Steven Grantham},
  title = {Design considerations for a cascaded grating interferometer suitable for EUV interference lithography},
  year = {2009},
  number = {8},
  month = {2009-04-10},
  publisher = {Applied Optics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=842467},
  language = {en},
}