@conference{69461,
  author = {Donald Windover and David Gil and Albert Henins and James Cline},
  title = {NIST High Resolution X-Ray Diffraction Standard Reference Material: SRM 2000},
  year = {2009},
  number = {1173},
  month = {2009-10-30},
  publisher = {2009 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics , Albany, NY},
  doi = {https://doi.org/10.1063/1.3251259},
  language = {en},
}