@conference{6926,
  author = {Martin Sohn and Richard Silver},
  title = {193 nm scatterfield microscope illumination optics},
  year = {2014},
  number = {9293},
  month = {2014-12-17},
  publisher = {International Optical Design Conference 2014, Kohala Coast, HI},
  doi = {https://doi.org/10.1117/12.2074211},
  language = {en},
}