@article{69111, author = {Thomas Germer}, title = {Effect of Line and Trench Profile Variation on Specular and Diffuse Reflectance From a Periodic Structure}, year = {2007}, number = {21}, month = {2007-03-05}, publisher = {Journal of the Optical Society of America A-Optics Image Science and Vision}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=841033}, language = {en}, }