@conference{69101,
  author = {Heather Patrick and Thomas Germer and Yifu Ding and Hyun and Lee Richter and Christopher Soles},
  title = {In situ measurement of annealing-induced line shape decay in nanoimprinted polymers using scatterometry},
  year = {2009},
  month = {2009-03-02},
  publisher = {Proceedings of the SPIE Conference on Alternative Lithographic Technologies, SPIE vol. 7271, 2009., San Jose, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=901568},
  language = {en},
}