@conference{69096, author = {Thomas Germer and Heather Patrick and Richard Silver and Benjamin Bunday}, title = {Developing an Uncertainty Analysis for Optical Scatterometry}, year = {2009}, month = {2009-08-03}, publisher = {Metrology, Inspection, and Process Control for Microlithography XXIII, San Jose, CA}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=901617}, language = {en}, }