@conference{69086,
  author = {Thomas Germer and Egon Marx},
  title = {Simulations of Optical Microscope Images},
  year = {2006},
  month = {2006-07-03},
  publisher = {Metrology, Inspection, and Process Control for Microlithography | 20th |   | SPIE},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=841006},
  language = {en},
}