@conference{69061,
  author = {Heather Patrick and Thomas Germer and Michael Cresswell and Richard Allen and Ronald Dixson and Michael Bishop},
  title = {Modeling and Analysis of Scatterometry Signatures for Optical Critical Dimension Reference Material Applications},
  year = {2007},
  month = {2007-05-07},
  publisher = {AIP Conference Proceedings},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=841085},
  language = {en},
}