@article{69011,
  author = {Gheorghe Stan and Sean King and Robert Cook},
  title = {Elastic modulus of low-k dielectric thin films measured by load-dependent contact-resonance atomic force microscopy},
  year = {2009},
  number = {24},
  month = {2009-09-14},
  publisher = {Journal of Materials Research},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902329},
  language = {en},
}