@article{68566,
  author = {Gery Stafford and O Kongstein and G Haarberg},
  title = {In Situ Stress Measurements During Aluminum Deposition From AlCl(subscript 3)-EtMeImCl},
  year = {2006},
  number = {153},
  month = {2006-10-01},
  publisher = {Journal of the Electrochemical Society},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853371},
  language = {en},
}