@misc{68436,
  author = {Robert Berg and David Green and G Mattingly},
  title = {Semiconductor Measurement Technology: Workshop on Mass Flow Measurement and Control for the Semiconductor Industry},
  year = {2001},
  month = {2001-02-01},
  publisher = {Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.SP.400-101},
  language = {en},
}