@article{68331, author = {Thomas Moffat and B Baker and Daniel Wheeler and John Bonevich and Monica Edelstein and D and L Gan and Gery Stafford and P Chen and William Egelhoff and Daniel Josell}, title = {Superconformal Electrodeposition of Silver in Submicrometer Features}, year = {2002}, number = {149}, month = {2002-08-01}, publisher = {Journal of the Electrochemical Society}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853123}, language = {en}, }