@conference{67281,
  author = {Joseph Kopanski and Muhammad Afridi and Chong Jiang and Curt Richter},
  title = {Test Chip to Evaluate Measurement Methods for Small Capacitances},
  year = {2009},
  month = {2009-03-30},
  publisher = {Proc., IEEE International Conference on Microelectronic Test Structures, Oxnard, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=901503},
  language = {en},
}