@article{66856,
  author = {Joseph Woicik and M Sahiner and Timothy Kurp and Jeffrey Serfass and Marc Aranguren},
  title = {Pulsed Laser Deposition and Characterization of Hf-based High-k Dielectric Thin Films},
  year = {2007},
  number = {515},
  month = {2007-10-26},
  publisher = {Thin Solid Films},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854160},
  language = {en},
}