@article{6676,
  author = {John Villarrubia and Andras Vladar and Bin Ming and Regis Kline and Daniel Sunday and Jasmeet Chawla and Scott List},
  title = {Scanning electron microscope measurement of width and shape of 10 nm patterned lines using a JMONSEL-modeled library},
  year = {2015},
  number = {154},
  month = {2015-07-01},
  publisher = {Ultramicroscopy},
  doi = {https://doi.org/10.1016/j.ultramic.2015.01.004},
  language = {en},
}