@article{66321, author = {Martin Green and Andrew Allen and J. Jordan-Sweet and Jan Ilavsky}, title = {Annealing Behavior of Atomic Layer Deposited HfO2 Films Studied by Synchrotron X-Ray Reflectivity and Grazing Incidence Small Angle Scattering}, year = {2009}, number = {105}, month = {2009-06-30}, publisher = {Journal of Applied Physics}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854475}, language = {en}, }