@conference{65641,
  author = {Ndubuisi Orji and Ronald Dixson and B Bunday and M Bishop and Michael Cresswell and J Allgair},
  title = {TEM Calibration Methods for Critical Dimension Standards},
  year = {2007},
  number = {6518},
  month = {2007-04-05},
  publisher = {Proceedings of SPIE, San Jose, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823228},
  language = {en},
}