@article{65601, author = {Safak Sayan and Nhan Nguyen and James Ehrstein and James Chambers and Mark Visokay and Manuel Quevedo-Lopez and Luigi Colombo and T Yoder and Igor Levin and Daniel Fischer and M Paunescu and Ozgur Celik and Eric Garfunkel}, title = {Effect of Nitrogen on Band Alignment in HfSiON Gate Dielectrics}, year = {2005}, number = {87}, month = {2005-11-22}, publisher = {Applied Physics Letters}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32000}, language = {en}, }