@conference{65576, author = {Ronald Dixson and William Guthrie and Michael Cresswell and Richard Allen and Ndubuisi Orji}, title = {Single Crystal Critical Dimension Reference Materials (SCCDRM): Process Optimization for the Next Generation of Standards}, year = {2007}, number = {6518}, month = {2007-04-05}, publisher = {Proceedings of SPIE, San Jose, CA}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823219}, language = {en}, }