@article{64816,
  author = {Mark Sobolewski},
  title = {Sheath Model for Radio-Frequency-Biased, High-Density Plasmas, Valid for all &#937;/&#937;<sub>Iota</sub>},
  year = {2000},
  number = {62},
  month = {2000-12-01},
  publisher = {Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)},
  language = {en},
}