@conference{64251,
  author = {E Landree and Terrence Jach and D Brady and A. Karamcheti and J Canterbury and W Chism and A Diebold},
  title = {Characterization of Silicon-Oxynitride Dielectric Thin Films Using Grazing Incidence X-ray Photoelectron Spectroscopy},
  year = {2001},
  month = {2001-01-01},
  publisher = {Characterization and Metrology for ULSI Technology Conference, -1},
  language = {en},
}