@conference{63931,
  author = {Richard Allen and Winthrop Baylies and Paul Langer and Ralph Danzl and Frank DelRio and Gavin Horn and Roy Knechtel and Michael Mattes and David Read and Sumant Sood and Kevin Turner},
  title = {A ROUND ROBIN EXPERIMENT TO PROVIDE PRECISION AND BIAS FOR SEMI MS5: TEST METHOD FOR WAFER BOND STRENGTH MEASUREMENTS USING MICRO-CHEVRON TEST STRUCTURES},
  year = {2009},
  month = {2009-12-07},
  publisher = {Procedings of the Conference on Wafer Bonding for Microsystems and Wafer Level Integration, Grenoble, -1},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=904232},
  language = {en},
}