@misc{63696, author = {Liangchun Yu and Kin Cheung and Vinayak Tilak and Greg Dunne and Kevin Matocha and Jason Campbell and John Suehle and Kuang Sheng}, title = {Demonstration of a Wafer-level Hall-Mobility Measurement Technique}, year = {2009}, month = {2009-12-03}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=905433}, language = {en}, }