@conference{62906,
  author = {John Woodward and Theodore Fedynyshyn and David Astolfi and Susan Cann and Michael Leeson},
  title = {Component Segregation in Model Chemically Amplified Resists},
  year = {2007},
  number = {6519},
  month = {2007-03-15},
  publisher = {SPIE Proceedings | Advanced Lithography | 2007 | SPIE},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=841082},
  language = {en},
}