@conference{62791,
  author = {Petr Cizmar and Andras Vladar and Michael Postek},
  title = {Optimization of Accurate SEM Imaging by Use of Artificial Images},
  year = {2009},
  number = {7378},
  month = {2009-05-22},
  publisher = {Scanning, Monterey, CA},
  language = {en},
}