@article{60771,
  author = {Michael Gaither and Frank DelRio and Richard Gates and Edwin Fuller and Robert Cook},
  title = {Strength distribution of single-crystal silicon theta-like specimens},
  year = {2010},
  number = {63},
  month = {2010-05-18},
  publisher = {Journal of Microelectromechanical Systems},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=904988},
  language = {en},
}