@article{60626,
  author = {Yvonne Gerbig and Stephan Stranick and Robert Cook},
  title = {Measurement of residual stress field anisotropy at indentations in silicon},
  year = {2010},
  number = {63},
  month = {2010-06-23},
  publisher = {Scripta Materialia},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=905445},
  language = {en},
}