@conference{60351,
  author = {Ronnie Fesperman and M Donmez and Shawn Moylan},
  title = {Ultra-Precision Linear Motion Metrology},
  year = {2010},
  number = {49},
  month = {2010-06-23},
  publisher = {ASPE 2010 Summer Topical Meeting on Precision Interferometric Metrology, Asheville, NC},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=905833},
  language = {en},
}