@article{59831,
  author = {Richard Mirin},
  title = {Fabrication of GaAs/AlOx micropillars for small mode volume},
  year = {2010},
  number = {28},
  month = {2010-01-20},
  publisher = {Journal of Vacuum Science and Technology B},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=903375},
  language = {en},
}